Rick Wallace
Chief Executive Officer and President

Rick Wallace serves as the chief executive officer and president of KLA-Tencor Corporation as well as a member of the company’s board of directors. He began as an applications engineer at KLA Instruments in 1988, and has held various general management positions throughout his 24-year tenure with the company. Earlier in his career, he held positions with Ultratech Stepper and Cypress Semiconductor.

Wallace currently serves on the boards of directors for NetApp, Inc., a data management solutions company; Semiconductor Equipment and Materials International (SEMI), a prominent industry organization; and the Silicon Valley Leadership Group, an organization focused on issues, programs and campaigns that affect the economic health and quality of life in the Silicon Valley.

Wallace earned his Bachelor of Science degree in electrical engineering from the University of Michigan and his Master of Science degree in engineering management from Santa Clara University.

Mark Dentinger
Chief Financial Officer and Executive Vice President

Mark Dentinger serves as chief financial officer and executive vice president of KLA-Tencor. In this position, he oversees and manages the company’s corporate finance, operational finance, investor relations and corporate control processes.

Prior to joining KLA-Tencor, Dentinger held senior finance roles for nine years at BEA Systems, Inc. (now part of Oracle Corporation), including chief financial officer during his last three years with the company. Additionally, he has served in various financial management positions at Compaq Computer Corporation (now Hewlett-Packard) and Ernst & Young.

Dentinger received his Bachelor of Science degree in economics from St. Mary’s College of California and an MBA in finance from the University of California at Berkeley.

Ben Tsai, Ph.D.
Chief Technology Officer and Executive Vice President of Corporate Alliances

Ben Tsai, Ph.D., is the chief technology officer and executive vice president of corporate alliances at KLA-Tencor. In this position, he is responsible for spearheading KLA-Tencor’s technology roadmap, business development, corporate alliances, and venture investments.

Tsai has spent more than 25 years at KLA-Tencor in various technology and business leadership positions. Previously, he has also served as senior vice president of technology at Tokyo Electron Limited.

Tsai currently serves on the board of directors and technical advisory board for Ultratech Inc. (NASDAQGM: UTEK), a leader in advanced packaging and laser processing. Additionally, he holds more than 40 patents in the areas of inspection and metrology.

Tsai received his Bachelor of Science degree in electrical engineering from the National Taiwan University, and his Master of Science and doctorate degrees in electrical engineering from the University of Illinois at Urbana-Champaign.