Rick Wallace
Chief Executive Officer and President

Rick Wallace serves as the chief executive officer and president of KLA-Tencor Corporation as well as a member of the company’s board of directors. He began as an applications engineer at KLA Instruments in 1988, and has held various general management positions throughout his 23-year tenure with the company. Earlier in his career, he held positions with Ultratech Stepper and Cypress Semiconductor.

Wallace currently serves on the boards of directors for NetApp, Inc., a data management solutions company; and Semiconductor Equipment and Materials International (SEMI), a prominent industry organization.

Wallace earned his Bachelor of Science in electrical engineering from the University of Michigan and his Master of Science in engineering management from Santa Clara University.

Mark Dentinger
Chief Financial Officer and Executive Vice President

Mark Dentinger serves as chief financial officer and executive vice president of KLA-Tencor. In this position, he oversees and manages the company’s corporate finance, operational finance, investor relations and corporate control processes.

Prior to joining KLA-Tencor, Dentinger held various senior finance roles for nine years at BEA Systems, Inc. (now part of Oracle Corporation), including chief financial officer during his last three years with the company. Prior to that, he served in various financial management positions for six years at Compaq Computer Corporation (now Hewlett-Packard), culminating in his appointment as director of finance for High Performance Systems Manufacturing in 1996. Before joining Compaq, Dentinger spent nearly a decade at Ernst & Young, where he worked as a junior staff auditor and later a senior manager.

Dentinger received his Bachelor of Science in economics from St. Mary’s College of California and his MBA in finance from the University of California at Berkeley.

Ben Tsai, Ph.D.
Chief Technology Officer and Executive Vice President of Corporate Alliances

Ben Tsai, Ph.D., serves as chief technology officer and executive vice president of corporate alliances at KLA-Tencor. In his post, Tsai is responsible for setting the technology direction for the company, business development, corporate alliances and venture investments.

Tsai has served in his current role since October 2006. He previously held the position of senior vice president of technology at Tokyo Electron Limited, from January 2005 to October 2006. Prior to 2005, Tsai spent 20 years at KLA-Tencor in various technology and business leadership positions. Tsai currently serves on the board of directors of Varian Semiconductor Equipment Associates, Inc. and Ultratech Inc., while also serving as a member of Ultratech’s technical advisory board.

Tsai holds more than 30 patents in the areas of inspection and metrology. He received his Bachelor of Science in electrical engineering from the National Taiwan University and his Master of Science and doctorate in electrical engineering from the University of Illinois at Urbana-Champaign.