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Lithography Glossary

Written by Chris Mack
Brought to you by the creators of PROLITH

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X-ray Lithography
Lithography using light of a wavelength in the range of about 0.1nm to 5nm, with about 1nm being the most common. Usually takes the form of proximity printing.

Example: X-ray lithography requires the use of proximity printing since focusing elements are difficult if not impossible to produce at these wavelengths.