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Technology Advantages

ADE provides the developers of today's leading edge technologies with the tools to measure the performance of their latest products and processes. Whether in R&D or in the production line, our customers depend on the precision and speed ADE products to give them the information they need to forge ahead.

 

Metrology

High precision engineering requirements of wafer preparation for integrated circuits demand high precision measurements. ADE products have measured more than 90% of every wafer made since the 1980's.

Companies that print the circuits onto wafers are "IC lithographers." Lithographers need strict control of incoming bare wafer quality control, as well as monitoring against contamination and process control during the printing, layering, and polishing processes. ADE products fill these niches today, for the very latest wafer technology.

 

Diversity of technology

ADE's intellectual property spans five categories of measurement technology expertise.

Scatterometry

Locates and indentifies particles and defects by detecting laser light scatter.

Interferometry

Uses the wave properties of light to optically measure shape, including very precise height variations.

Capacitance

Measures thickness of wafers by detecting electrical capacitance variations.

Reflectometry

Determines thin film composition and thickness by measuring light reflected at different wavelengths.

Magnetometry

Maps magnetic field properties, including strength and polarity.
 

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