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Metrology is a critical discipline in the production of high performance, reliable devices. Whether verifying that a design will be manufacturable, characterizing a new process, or monitoring high-volume manufacturing processes, our comprehensive set of metrology solutions, analysis and process window optimization solution gives IC manufacturers the ability to maintain tight control of their processes.
Overlay Metrology Solutions
Optical CD Metrology Solutions
- SpectraShape: Optical critical-dimension (CD) and shape metrology solutions
Film Thickness / Index Metrology Solutions
- Aleris Family: Film thickness, refractive index (RI), stress and composition metrology solutions for leading-edge applications
- SpectraFx: Film thickness, RI and stress metrology solutions for product wafers at the 90nm and 65nm nodes
- SURFmonitor: Metrology module for Surfscan SPx Series tools providing full-wafer maps that correlate to film properties, for blanket films
Wafer Geometry and Topography Solutions
- WaferSight: Wafer thickness, shape and flatness metrology solutions
- SURFmonitor: Metrology module for Surfscan SPx Series tools indicating sub-Angstrom surface topography variation on blanket films and bare substrates
Implant and Anneal Metrology Solutions
Surface Profiling Solutions
- HRP-x50: Automated, stylus-based surface profilers for topographic surface metrology
Resistivity
- RS-x00: Sheet resistance mapping solutions
Reticle Pattern Placement Metrology Solutions
- IPRO Series: Reticle pattern placement metrology solutions
Macro and Edge Inspection Tools
- CIRCL: Inspection, metrology and review cluster solutions for all wafer surfaces
- VisEdge Family: Standalone wafer edge defect inspection, metrology and review solutions
Data Management
- K-T Analyzer: Data analysis solution for overlay and CD metrology data
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