SAN JOSE, Calif., June 22, 2005--KLA-Tencor (NASDAQ: KLAC) today introduced Online Recipe Services, a new service offering that speeds tool recipe qualification and troubleshooting via online access to KLA-Tencor applications experts worldwide. Available through iSupport--KLA-Tencor's highly secure network that includes expert onsite support, 24/7 online support and e-diagnostics that are built into every new KLA-Tencor tool--Online Recipe Services provides fast response to recipe issues through measurement effectiveness. Online Recipe Services is the latest example of KLA-Tencor's ongoing investment to enhance its e-diagnostics services to lower customers' support costs and increase tool efficiency. Multiple integrated device manufacturers and one of the world's leading foundries are already leveraging Online Recipe Services and have experienced faster time to results.

"Given the high volume of recipes and complexity in today's fab environment, our customers need to have ready access to expert support from their vendors in order to resolve recipe issues and enhance the capabilities of their products," stated Jorge Titinger, senior vice president and general manager of Global Support Services at KLA-Tencor. "Online Recipe Services is an efficient and cost-effective way for our customers to get the production support they need to meet their ever-changing manufacturing requirements."

When a recipe issue arises, Online Recipe Services enables KLA-Tencor applications experts to remotely access the tool from any one of its worldwide online support centers to quickly troubleshoot the issue or help qualify a new recipe--reducing or eliminating the wait time needed for onsite support. It complements onsite support teams by enabling onsite personnel to focus their efforts on the highest priority tools and recipe issues, while online applications experts address more routine issues. Online Recipe Services also helps facilitate customer training and knowledge transfer, all of which is accomplished in the customer's local language.

Online Recipe Services is in use at KLA-Tencor's Taiwan Online Support Center, and its deployment will continue to be rolled out worldwide over the coming year. The offering is available for customers who have iSupport, tools under warranty or a qualifying service agreement.

About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, Calif., the company has sales and service offices around the world. An S&P 500 company, KLA-Tencor was named one of the Best Managed Companies in America for 2005 by Forbes Magazine and is the only company in the semiconductor industry to receive the accolade for this year. KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC. Additional information about the company is available on the Internet at http://www.kla-tencor.com

Contact:
Meggan Powers
Director Corporate Communications