Product Description

K-T- Analyzer is seamlessly integrated with the Archer overlay metrology platform for 65nm and below IC production. K-T Analyzer provides automated, on-tool analysis of overlay and CD metrology data in real-time, providing immediate feedback on the quality of the lithography process.

• Real-time data enables error correction, reduces unnecessary wafer rework, and allows for efficient use of lithography equipment
• K-T Analyzer provides optimal productivity and tight process control in the lithography cell
• Automated litho cell correctibles solution speeds decision making for advanced process control
• Leading fabs worldwide use K-T Analyzer to enhance focus/dose analysis applications

Application

Overlay control, focus and dose control

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